Product/Service

F40 Thin-Film Thickness Measuring Tool

Source: Filmetrics, Inc.
Thickness is measured quickly and easily with Filmetrics' advanced spectrometry systems
Turns Your Microscope into a Thin-Film Thickness Measuring Tool

Thickness is measured quickly and easily with Filmetrics' advanced spectrometry systems. Spectral analysis of reflections from the top and bottom of the thin-film provides thickness in seconds.

For measurements on patterned surfaces and other applications that require a spot size as small as 10 microns just add the model F40 to your microscope. For common microscopes the F40 is a simple bolt on attachment, complete with c-mount for CCD camera.

Example Layers
Virtually any smooth, translucent or lightly absorbing film may be measured. This includes:

SiO2 SiNX
DLCPhotoresist
PolysiliconPolyimide
Polymer layersAmorphous Silicon

Example Substrates
For thickness measurements, all that is required in most cases is a smooth, reflective substrate. Examples include:

SiliconGlass
Aluminum Steel
GaAsPolycarbonate
Polymer films

Performance Specifications
Thickness Measurement Range
5x objective 20 nm to 20 µm
10x objective 20 nm to 15 µm
50x objective 20 nm to 2 µm

Spot Size
5x objective 100 µm
10x objective 50 µm
50x objective 10 µm

Filmetrics, Inc., 9335 Chesapeake Dr., San Diego, CA 92123. Tel: 858-573-9300; Fax: 858-573-9400.