F40 Thin-Film Thickness Measuring Tool
Thickness is measured quickly and easily with Filmetrics' advanced spectrometry systems. Spectral analysis of reflections from the top and bottom of the thin-film provides thickness in seconds.
For measurements on patterned surfaces and other applications that require a spot size as small as 10 microns just add the model F40 to your microscope. For common microscopes the F40 is a simple bolt on attachment, complete with c-mount for CCD camera.
Example Layers
Virtually any smooth, translucent or lightly absorbing film may be measured. This includes:
SiO2 | SiNX | |
DLC | Photoresist | |
Polysilicon | Polyimide | |
Polymer layers | Amorphous Silicon |
Example Substrates
For thickness measurements, all that is required in most cases is a smooth, reflective substrate. Examples include:
Silicon | Glass | |
Aluminum | Steel | |
GaAs | Polycarbonate | |
Polymer films |
Performance Specifications
Thickness Measurement Range
5x objective 20 nm to 20 µm
10x objective 20 nm to 15 µm
50x objective 20 nm to 2 µm
Spot Size
5x objective 100 µm
10x objective 50 µm
50x objective 10 µm
Filmetrics, Inc., 9335 Chesapeake Dr., San Diego, CA 92123. Tel: 858-573-9300; Fax: 858-573-9400.