F20 Advanced Thin-Film Measurement System

An Advanced Thin-Film Measurement System at a Breakthrough Price Thickness, refractive index, and extinction coefficient are measured quickly and easily with Filmetrics' advanced spectrometry system. Spectral analysis of reflections from the top and bottom of the thin-film provides thickness and optical constants [n and k] in seconds. The entire desktop system sets up in minutes and can be used by anyone with basic computer skills. The F20 is ideal for both on-line manufacturing and table-top use.

The F20 includes everything required for measurements: spectrometer, light source, fiber-optic cables, lens assemblies and software in standard WindowsTM 95/98/NT interface, just add your computer.

Example Layers
Virtually any smooth, translucent or lightly absorbing film may be measured. This includes:

SiO2		SiNX
DLC		Photoresist
Polysilicon		Polyimide
Polymer layers		Amorphous Silicon

Example Substrates
For thickness measurements, all that is required in most cases is a smooth, reflective substrate. For optical constant measurements, a flat specularly reflective substrate is required, and if the substrate is transparent, the substrate backside must be prepared so that it is not reflective. Examples include:

Silicon		Glass
Aluminum		Steel
GaAs		Polycarbonate
Polymer films

Measurement of Range

Model		Thickness		Thickness with n and k
F20		150 Å to 50 µm		1000 Å to 5 µm
F20-UV		30 Å to 20 µm		500 Å to 5 µm

Filmetrics, Inc., 9335 Chesapeake Dr., San Diego, CA 92123. Tel: 858-573-9300; Fax: 858-573-9400.