Excimer Laser
Source: Cymer, Inc.
The ELS-6010 KrF production laser operates at 2500Hz and is designed to provide full imaging capability for 200mm and 300mm lithography steppers and scanners with>0.7 numerical aperture lens designs
Cymer, Inc.LS-6010 KrF production laser operates at 2500Hz and is designed to provide full imaging capability for 200mm and 300mm lithography steppers and scanners with>0.7 numerical aperture lens designs. The laser delivers this level of spectral performance through a line-narrowed bandwidth or <0.5pm at full-width half maximum (FWHM) and <1.4pm at 95% energy integral and provides an improvement in dose stability performance at less than or equal to +0.35%.
The laser includes a high voltage power supply, laser discharge chamber and wavelength stabilization module.
<%=company%>, 16750 Via Del Campo Court, San Diego, CA 92127-1712, Tel: 858-385-7300, Fax: 858-385-7100
This website uses cookies to ensure you get the best experience on our website. Learn more