EPOC MF, E-Cell EDI
Source: Kinetico Incorporated
EPOC MF works to remove suspended solids and recycles water back to UPW system, secondary uses, or to an optional EDI polisher and then directly to the tool.
EPOC Microfiltration (MF)
and E-Cell
Electrodeionization (EDI)
for Semiconductor
Backgrinding, Wafer
Shaping, Dicing and
Sawing applications
Custom and standard systems are available to meet your specifications.
Wafer shaping and cutting processes produce large volumes of wastewater primarily containing suspended solids requiring treatment and recycling. EPOC MF works to remove suspended solids and recycles water back to UPW system, secondary uses, or to an optional EDI polisher and then directly to the tool.
Benefits
- >95% water recycle
- Superior abrasion and chemical resistance
- Chemical-free wastewater recycling
- Lowest cost of ownership (COO) available
- 99.9% removal of suspended particles (<.001 micron)
- Proven semiconductor installations
- Durable membrane, warranted 3 years under abrasive conditions
Custom and standard systems are available to meet your specifications.
Kinetico Incorporated, 10845 Kinsman Rd., Newbury, Ohio 44065. Phone: 440-564-5397; Fax: 440-338-8694.