EnChem Wastewater Treatment Technology

EnChem, a proprietary polymer process enabling selective filtration of both dissolved and suspended contaminants for semiconductor manufacturers, is used in chemical mechanical planarization (CMP), fluorinated chemistries, or copper interconnects. The company recently acquired this technology from Environmental Chemistries Inc., and has since engineered the process to address the semiconductor industry's need for a reliable and safe water reclamation process that would reduce water consumption, operating costs, and valuable fab footprint.

As a reduction in water use implies, there is an immediate need for improved, cost-effective, efficient waste treatment to ensure process water is conserved and safe to reclaim after use. EnChem is capable of reducing water usage during the semi-conductor manufacturing process by up to 85% through reclaim while providing greater flow rates with a smaller overall system size. The production-proven system also exceeds the industry standard for wastewater process treatments by removing more than 99.7% of the contaminating materials at a lower cost of ownership than competing systems.

EnChem is engineered to treat CMP Wastewater streams to remove H.F., silica, copper, tungsten, alumina, and silicon materials. The system will replace the arcane processes used in copper electroplating waste processing and is more effective and cost competitive than electrowinning copper waste. Unlike traditional filtration systems, EnChem can treat the combined waste streams of electroplating solutions, wafer rinse water, and CMP slurry in a single process.

Microbar Inc., Contact: George Canavan, 408-542-9066.