Edge Scan
Source: Hologenix
The Raytex Edge Scan uses a proprietary non-contact laser based system to rapidly inspect the entire wafer edge for cracks, chips, scratches and other edge surface anomalies
Features:
Detects Cracks, Chips, Scratches, and Roughness
Fully Automated High Speed System
Laser and Video Based Inspection
Non-Contact High Speed Pre-Aligner
Multiple Wafer Sizes
Optional SECS-GEM
Optional Automatic Defect Classification
Detects Cracks, Chips, Scratches, and Roughness
Fully Automated High Speed System
Laser and Video Based Inspection
Non-Contact High Speed Pre-Aligner
Multiple Wafer Sizes
Optional SECS-GEM
Optional Automatic Defect Classification
The Raytex Edge Scan uses a proprietary non-contact laser based system to rapidly inspect the entire wafer edge for cracks, chips, scratches and other edge surface anomalies. It also uses an image processing system to inspect the notch, and to make a final pass/fail determination for each defect. Video images of the defects can then be printed or stored on the systems optical drive.
Hologenix, 15301 Connector Lane, Huntington Beach, CA 92649. Tel: 714-903-5999; Fax: 714-903-5959.
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