ECLIPSE 200
Source: SCP Global Technologies
The ECLIPSE 200 is an ultra-small footprint system designed for superior FEOL and BEOL wet processing
The ECLIPSE 200 is an ultra-small footprint system designed for superior FEOL and BEOL wet processing. It is the ideal tool for process R&D, and is easily integrated into a production environment.
ECLIPSE 200 Features:
- Multi-tank system: filtered, recirculated process module with megasonics option
- One GreenDry with chemical inject, rinse and dry capability
- Expandable for additional tanks
- 1 meter wide by 2 meters long by 2.5 meters high
- Configurable to 300mm
Ideal for advanced R&D applications
- Flexible configurtions for rapid turnaround of experiments
- Conformal tanks and low profile process carrier for optimized fluid flow
- Advanced data collection and process monitoring capabilities
- Industry's best dryer particle performance
- 0 particles @ 0.12µ and 0.09µ on hydrophilic wafers
less than 5 particle adders @ 0.12µ on hydrophobic wafers
- Quick installation: Single frame, self contained tool with no remote support equipment
- Simple design for high reliability and ease of maintenance
SCP Global Technologies, 400 Benjamin Lane, Boise, ID 83704. Tel: 208-377-9700; Fax: 208-375-4540.