Product/Service

E-beam Inspection Tool

Source: KLA-Tencor
Model eS20 is an in-line scanning e-beam inspection tool designed for use in sub 0.18 micron and copper device full-volume production applications
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KLA-Tencoris an in-line scanning e-beam inspection tool designed for use in sub 0.18 micron and copper device full-volume production applications. Detecting yield-limiting defects, it works with the company's Sample Planner software, a package that generates a customized, fab-wide inspection strategy. Engineered primarily for post-CMP and post-etch monitoring, the tool's performance is not limited by resolution, color, grain or pattern noise. It is also designed as a 200/300 mm bridge tool. Suited for inspecting memory devices, the system can also perform the die-to-die comparisons necessary for inspecting logic devices.

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