DUV Thin Film Measurement System
Source: Nanometrics Inc
The NanoSpec 9000i provides deep ultraviolet (DUV) spectrum measurement capability in addition to absolute reflectance measurements
Nanometrics Incc 9000i provides deep ultraviolet (DUV) spectrum measurement capability in addition to absolute reflectance measurements in order to measure thin films during wafer processing. The integrated system performs 190nm-800nm film measurements for production monitoring and control of films and film stacks such as anti-reflective coatings (ARC) and sub-100A gate oxides. The tool is part of the company's InTool series of integrated metrology systems.
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