DURATRON® XP

Duratron® XP is a high-purity, easy-to-machine polyimide ideal for components in semiconductor manufacturing and test equipment. Like other polyimides, Duratron® XP has high strength and high heat resistance. Duratron® XP polyimide stock shapes, including rod, bar and plate, can be easily machined to make dimensionally stable, structural parts designed for continuous use at temperatures up to 500°F.

Duratron® XP has low levels of ionic impurities. All metallic impurities are controlled to be less than 1 ppm. Further, Duratron® XP exhibits low outgassing when tested in accordance with ASTM E595: total material loss (TML), after 24 hrs. at 125°C and a vacuum of 10-5 mm Hg, is less than 1% and 0.00% collected volatile condensable material (CVCM). Due to its low outgassing rates and low ionic impurities, Duratron® XP is ideal for parts used in plasma etching chambers, such as locating rings, pedestals and frames.

Duratron® XP also has excellent chemical resistance. It is extremely resistant to aromatic hydrocarbons, acids and bases. Tests show that Duratron XP exhibits little or no loss of strength after prolonged exposure (100 hrs at 73°F) in acetic acid, hydrochloric acid, phosphoric acid, nitric acid and sodium hydroxide.

DSM Engineering Plastic Products, 2120 Fairmont Ave., Reading, PA 19612-4235. Tel: 610-320-6600; Fax: 610-320-6868.