Double Sided Cleaning Processor
Source: Solid State Equipment Corporation
At nearly every step from incoming wafer to finished, etched wafer, cleaning is a critical requirement.
Solid State Equipment Corporationvery step from incoming wafer to finished, etched wafer, cleaning is a critical requirement. Removal of organics, inorganics, and particulates without adding contamination or scratching is a severe challenge. The fully automatic Evergreen Model 203 DSS implements double-brush, double-sided scrubbing with a versatile rinse/dry for an effective cleaning process. A compact footprint- less than 14 sq. ft.- and throughput capability of over 100 wafers per hour give this single wafer cleaning processor the speeds and square foot savings to make a significant impact on cost of ownership and productivity.
With single wafer double PVA brush scrubbing in two independent brush box stations, fast, gentle, contamination-free handling robotics, and convenient computer-driven process control, the Model 203 DSS is a suitable double-sided wafer scrubber. The double-brush system has proven cleaning performance down to 0.1 µm. With its compact footprint, Windows user interface, convenient cassette loader, and Year 2000 compliance, the SEMI S2-93 compliant Evergreen Model 203 DSS is a safe, easy-to-use production tool.
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