Dielectric Slurry
Source: Cabot Microelectronics Corporation
The Semi-Sperse D7300 dielectric slurry is developed for advanced interlevel dielectric (ILD) applications
Cabot Microelectronics Corporationerse D7300 dielectric slurry is developed for advanced interlevel dielectric (ILD) applications. This slurry enables a ten-fold reduction in post-CMP microscratching over available industry standard ILD slurries.
As device geometries shrink down to 0.18-micron and smaller, microscopic defects on the wafer surface become increasingly detrimental, adversely affecting the performance of today's most advanced integrated circuits (ICs). Reducing these microdefects helps boost chip yields while optimizing cost of ownership.
Cabot Microelectronics' scientists have discovered how to leverage proprietary chemical know-how to enable a significant reduction in CMP-induced defects while lowering the concentration of mobile ions introduced during the CMP process. Both improvements enable higher yields.
<%=company%>, 500 Commons Drive, Aurora, IL 60504. Tel: 630-585-9471. Fax: 630-585-9976
As device geometries shrink down to 0.18-micron and smaller, microscopic defects on the wafer surface become increasingly detrimental, adversely affecting the performance of today's most advanced integrated circuits (ICs). Reducing these microdefects helps boost chip yields while optimizing cost of ownership.
Cabot Microelectronics' scientists have discovered how to leverage proprietary chemical know-how to enable a significant reduction in CMP-induced defects while lowering the concentration of mobile ions introduced during the CMP process. Both improvements enable higher yields.
<%=company%>, 500 Commons Drive, Aurora, IL 60504. Tel: 630-585-9471. Fax: 630-585-9976
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