Product/Service

Dielectric PECVD Solutions

Source: Novellus Systems Inc.
Plasma CVD (PECVD) systems deliver high film quality, high net throughput, and low cost of ownership in customers' high-volume fabrication facilities
Novellus Systems Inc.vellus' Plasma CVD (PECVD) systems deliver high film quality, high net throughput, and low cost of ownership in customers' high-volume fabrication facilities. These systems include:

Concept One: 150/200mm

Concept One MAXUS
Based on the Concept One platform, MAXUS features an enhanced dual frequency design, resulting in enhanced productivity.

Concept Two SEQUEL
SEQUEL integrates the Concept One process chamber on Concept Two's modular platform.

Concept Two Dual SEQUEL
Dual SEQUEL combines two process chambers with 12 deposition stations to provide the industry's highest productivity for thick dielectric films.

Concept Two SEQUEL Express
The SEQUEL Express chemical vapor deposition (CVD) tool is designed to deposit Novellus' Coral family of low dielectric constant (low-k ) films, as well as all other advanced dielectric films required for 0.18-micron and smaller devices.

With a maximum throughput in excess of 110 wafers per hour (wph), the system delivers a high capital productivity, a high footprint productivity, and a low cost of ownership, according to the company. A 300 mm version of the tool is also available.

The deposition system leverages the SEQUEL platform's multi-station sequential deposition architecture. Each wafer is processed through the same path as every other wafer in the lot. Six sequential deposition layers prevent the propagation of pinholes and provide enhanced copper-diffusion blocking even with ultra-thin films. Power densities are approximately one-third the level used in single-wafer and mini-batch reactors. This enables volume production with high device yields and damage-free processing.

The VECTOR System
VECTOR is a plasma enhanced chemical vapor deposition (PECVD) system, capable of depositing all the dielectric films required for 0.10 dual damascene structures. VECTOR delivers superior film uniformity and repeatability by leveraging Novellus' proven multi-station sequential deposition technology. VECTOR has been optimized to deposit the latest CORAL film, which is extendible to deliver the low dielectric constant required for 0.10 and smaller geometries.

<%=company%>, 4000 North First Street, San Jose, CA 95134. Tel: 408-943-9700; Fax: 408-943-3422.