DIBORANE
Source: Voltaix, Inc.
A flammable, toxic, colorless gas used primarily as a p-type dopant for the deposition
A flammable, toxic, colorless gas used primarily as a p-type dopant for the deposition of epitaxial and amorphous silicon and as a component in the CVD of BPSG (borate-phosphate-silicate-glass) coatings.![]()
Voltaix, Inc., P.O. Box 5357, 197 Meister Avenue, North Branch, NJ 08876. Tel: 908-231-9060; Fax: 908 231-9063.