DeviceNet Family of Capacitance Manometers

MKS Instruments, Inc. has introduced a family of digital DeviceNet compliant capacitance manometers conforming to ODVA specs. The new series of digital manometers includes Types CT22, CT27, and CT28 that are equivalent to their MKS non-digital counterparts—MKS Types 622, 627, and 628. The CT22 operates at ambient temperature. The CT27 and CT28 are temperature controlled and operate at 45°C and 80°C, respectively. At the heart of these manometers is the capacitance-based extremely stable and repeatable MKS Baratron pressure sensor that provides pressure readings independent of gas composition.

DeviceNet is a leading industrial network for intelligent sensors and actuators. The network is managed by the ODVA (Open DeviceNet Vendors Association), which is an independent supplier organization. DeviceNet is a low-level network designed to connect industrial devices (sensors and actuators) to higher-level controllers such as PCs, PLCs, or embedded controllers. The network facilitates interchangeability of devices from different vendors most often used in manufacturing applications and enjoys the advantages of a producer-consumer network.

The CT22 is the most economical of the digital Baratron capacitance process manometers and operates at ambient temperature. The transducer is available in Full-Scale ranges from 10 to 1000 Torr. A high overpressure rating of 45 psia improves reliability.

The CT27 is an ultra-stable temperature-regulated capacitance manometer controlled at 45°C to provide pressure measurement accuracy within 0.12% of Reading. This accuracy specification includes the effects of nonlinearity, hysteresis, and repeatability and is superior to the usual specification that is given in terms of percent of Full Scale. Temperature control electronics ensure long-term stability and repeatability. The CT27 is available in ten Full Scale pressure ranges from 1,000 down to 20 mTorr to accommodate lower process pressures. The all-Inconel, all-welded sensor is compatible with corrosive gas applications, such as plasma etching and chemical vapor deposition. The stainless steel case is cleanroom compatible.

The CT28 is temperature regulated at 80°C and accurate to 0.25% of Reading. It is available in Full-Scale ranges from 0.05 to 1000 Torr.

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