Brochure Describes Mark 50 High-Vacuum Deposition System Offered By CHA Industries
Using a special CHA-designed web roll fixture, one branch of the Mark 50 family tree of systems can coat a wide variety of flexible substrate materials for applications such as flat panel displays, solar cells, flexible printed circuits, electromagnetic shields, capacitors, and second-cell (rechargeable) batteries, as well as ITO and AR coatings onto thin plastic and copper foil for magnetic tape, and consumer product packaging uses.
"Wafer" applications for the Mark 50 systems include precision coating of semiconductor materials, LEDs, MEMs, and MR/MGR heads, as well as a wide range of components and materials in the optical, ophthalmic, optical recording, magnetic media, medical, automotive, aviation, and metallurgical fields.
The CHA Mark 50 Systems are available with a quick-access source design for maintenance, and a "load lock" chamber designed to isolate the source(s) from the process chamber between loading and unloading wafers. Mk50's with this feature enable: Pre-deposition processes to be performed in the process chamber while isolated from the source(s), substrates can be loaded and unloaded while the deposition sources are maintained under a high level of vacuum, or vacuum integrity can be maintained for a batch of substrates while the source chamber can be vented during the run.
An optional PLC/PC-based control system automatically controls each step in the air-to-air process, as well as provides a real-time, interactive flat panel display of system and process status. Visual and audible "pop up" screens keep the operator aware of system or process faults and include displays of suggested corrective action.
The space-efficient Mark 50 System is designed for ballroom or through-the-wall mounting to meet cleanroom requirements, while conserving valuable floor space. It incorporates a unique, patented drop-down door on the front of the chamber to minimize floor space requirements while providing ease of access. The system's process chamber and fixturing are ergonomically designed to minimize operator fatigue while maximizing efficiency.
The Mark 50 can be used for both sputtering and evaporation processing, either as dedicated systems, or sequentially within the same run. It utilizes moving substrates and precision process control for consistently high film uniformity, typically less than +/-5% across substrate, substrate to substrate, run to run.
About CHA
Founded in 1954, CHA Industries is a privately held company that manufactures high vacuum deposition systems for both new and well-established domestic and international customers. Today, CHA has become an industry leader providing systems used to produce in the precision coatings in a wide variety of industrial products and applications. The company currently manufactures a series of evaporation and sputtering systems designed for the processing of large to small quantities of substrates.
Drive, Fremont, CA 94538; Phone: 510-683-8554, Fax: 510-683-3848,
Or visit us at www.chaindustries.com
CHA Industries, 4201 Business Center Drive, Fremont, CA 94538-6357. Tel: 510-683-8554; Fax: 510-683-3848.