Product/Service

Defect Review System

The Prior Scientific Defect Review System is an accurate, easy-to-use computerized system

Featured at Semicon West

The Prior Scientific Defect Review System is an accurate, easy-to-use computerized system for the review and reclassification of wafer defects. The system reviews KLA and Tencor defect files. Meeting every vital need for easy wafer defect review, this system works with almost any microscope while positioning the stage for review of selected defects. This results in increased yields, reduced costs, and greater utilization on existing assets. The system comes with the computer, Defect Review software, and Prior ProScan motorized stage system. The Windows NT 4.0 operating system is user-friendly and delivers full 32-bit-processing power. All pertinent wafer identification criteria are present on-screen with an extensive tool bar, providing access to program functions. All die and defect locations are shown on a wafer map with live, on-screen details of each wafer. Images can also be saved for later analysis.

Prior Scientific Inc., 80 Reservoir Dr., Rockland, MA 02370-1062. Contact: John Commesso, 781-878-8442; Fax: 781-878-8736.