Product/Service

Defect-Review SEM

Source: Applied Materials, Inc.
The SEMVision cX is designed for the automatic review and classification of wafer defects in advanced semiconductor production lines
The SEMVision cX is designed for the automatic review and classification of wafer defects in advanced semiconductor production lines. The product builds on the company's SEMVision system.

The product features automatic material identification that characterizes defects on unpatterned wafers and provides chipmakers with information on the defect's source. The system also offers operation at 500 defects per hour and color MPSI (Multiple Perspective SEM Imaging) for enhanced topography and material information. These features work together to provide chipmakers with defect information on both patterned and unpatterned wafers, alerting them of process excursions and helping identify the defect's source to enable faster time to correction.

Applied Materials, Inc., 3050 Bowers Avenue, Santa Clara, CA 95054-3299. Tel: 408-727-5555. Fax: 408-748-9943.