Defect Classification Software

KLA-Tencorpackage, designated Real-Time Classification (RTC) software, is designed to reduce the time it takes to detect process excursions that affect yields. The software provides preliminary defect classification during the inspection process which optimizes the defect samples that are sent to high resolution defect classification (HRDC) or SEM review. The package is a subset of the company's Impact automated defect classification (ADC) software for in-line monitoring and operates on brightfield-based in-line monitoring (ILM) systems or darkfield-based process tool monitoring systems. It allows users to customize defect classes in order to reflect the real layer-by-layer yield concerns of a particular fab. This filtering capability makes it possible to run the inspection tool at the highest sensitivity mode without being overwhelmed by nuisance defects, enabling the capture of small yield-relevant defects associated with sub-0.25 micron geometries.

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