Product/Service

Cyclone Systems

Source: MRL Industries
The Cyclone is a low cost alternative to traditional horizontal "workhorses," providing consistent temperature uniformity and patented heating elements.
MRL Industries is a low cost alternative to traditional horizontal "workhorses," providing consistent temperature uniformity and patented heating elements.

Features

  • 150 to 300mm capability
  • Choose from 30/40-inch flat zone for 150-200mm wafers or 24/30-inch flat zone for 300mm wafers
  • The company's proven, patented heating elements design
  • Four independent tube levels for process and maintenance isolation
  • Argus gas delivery systems
  • Fully integrated PC-based DDC process controller ensures precise temperatures from 200° C to 1300° C and reliable operation
  • Horizontal laminar flow inline load station with atmospheric cantilever assemblies ensures clean, automatic loading of all wafer sizes.
  • Easy and safe operation

Construction

  • Easy spare parts access and maintenance
  • Elements mounted on slides for easy removal
  • Hinged/bi-fold doors and panels permit quick service access to TCs and SCRs
  • Load station drawers slide open for access to control components
  • Source cabinet components are slide-mounted for access during rear tube pull
  • Configuration matches existing lab equipment
  • Conforms to standard industrial codes and specifications, i.e., SEMI, NEC, ANSI, NFPA and OSHA
  • Floating frame eliminates system pads to improve weight distribution, ease frame alignment, eliminate any chance of pads shearing from movement or installation, and keep dust from areas under the system

<%=company%>, 19500 Nugget Blvd., Sonora, CA 95370. Tel: 209-533-1990. Fax: 209-533-4079.