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CVD Silicon Carbide Properties And Typical Values

CVD Silicon Carbide Properties And Typical Values
Typical Trace Element Impurities in Parts per Billion by Weight using Gas Discharge Mass Spectrometry (GDMS) and Neutron Activation Analysis (NAA)
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PROPERTIES

TYPICAL VALUES
(Room Temperature)

Crystal Structure
FCC (face-centered cubic b-phase)
polycrystalline
Sublimation Temperature (degrees C) ~ 2700
Grain size (microns) 5 - 10
Density (grams per cc) 3.21
Hardness (kg per square mm) -
- Knoop (500 g load) 2540
- Vickers (500 g load) 2500
Chemical Purity >99.9995% SiC
Flexural Strength, 4-point (MPa/Ksi)
Mil Std 1942 B		 -
- At Room Temperature 470 / 68
- At 1400 oC 575 / 84
Weibull Parameters -
- Modulus, m 11.45
- Scale Factor, beta (Mpa/Ksi) 462 / 66
Fracture Toughness, KIC values -
- Micro-indentation (MN m-1.5) 3.3
- Controlled Flow (MN m-1.5) 2.7
Elastic Modulus (GPa/106 psi) -
- Sonic 466 / 68
- 4 point Flexure 461 / 67
Coefficient of Thermal Expansion (1/K) -
- At Room Temperature 2.2 x 10-6
- Room Temperaure to 1000 oC 4.0 x 10-6
Heat Capacity (J/Kg-K) 640
Thermal Conducitivy (W/m-K) 300
Poisson's Ratio 0.21
Polishability (Optical profilometer) <3 Angstroms RMS
Electrical Resistivity Standard 20 - 5,000 Ohm-cm
Low 1 - 10 Ohm-cm

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CVD SILICON CARBIDE - Typical Trace Element Impurities in Parts per Billion by Weight using Gas Discharge Mass Spectrometry (GDMS) and Neutron Activation Analysis (NAA).
Element GDMS NAA Element GDMS NAA
Li <3.2 - Rh <3.6 -
Be <5.9 - Pd <25 -
B 290 - Ag <20 <0.047
Na 30 0.63 Cd <150 <0.57
Mg <34 - In <22 <0.097
Al 9.1 - Sn <29 <4.1
P 28 - Sb <27 0.072
S 88 - I <63 -
K <9.4 <21 Te <26 -
Ca <5.8 <840 Cs <13 <0.0083
Sc <0.64 <0.0006 Ba <5.7 <2.2
Ti <4.2 <1400 La <1.2 <0.0062
Cr - 0.16 Ce <9.8 <0.038
V <1.4 - Eu - 0.021
Mn <3.9 - Tb - <0.0004
Fe <40 <5 Yb - <0.021
Co <4.0 <0.67 Nd <7.3 -
Ni <13 205 Hf <6.1 <0.0058
Cu <16 1.55 Ta - <0.0057
Zn <36 1.28 W <12 0.688
Ga <29 <0.16 Re <5.3 -
Ge <28 - Os <6.3 -
As <9.4 5.70 Ir <8.5 <0.0001
Se <100 0.11 Pt <9.6 <19
Br - <0.02 Au - 0.028
Rb <11 <0.36 Hg <43 <0.02
Sr <1.1 <3.9 Tl <21 -
Y <0.87 - Pb <7.1 -
Zr <3.2 <4.5 Bi <6.1 -
Nb <3.5 - Th <0.61 <0.007
Mo <17 0.28 U <0.42 <0.039
Ru <7.5 - - - -

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