CVD Silicon Carbide Properties And Typical Values
Typical Trace Element Impurities in Parts per Billion by Weight using Gas Discharge Mass Spectrometry (GDMS) and Neutron Activation Analysis (NAA)
PROPERTIES |
TYPICAL VALUES |
| Crystal Structure |
FCC (face-centered cubic b-phase) polycrystalline |
| Sublimation Temperature (degrees C) | ~ 2700 |
| Grain size (microns) | 5 - 10 |
| Density (grams per cc) | 3.21 |
| Hardness (kg per square mm) | - |
| - Knoop (500 g load) | 2540 |
| - Vickers (500 g load) | 2500 |
| Chemical Purity | >99.9995% SiC |
| Flexural Strength, 4-point (MPa/Ksi) Mil Std 1942 B |
- |
| - At Room Temperature | 470 / 68 |
| - At 1400 oC | 575 / 84 |
| Weibull Parameters | - |
| - Modulus, m | 11.45 |
| - Scale Factor, beta (Mpa/Ksi) | 462 / 66 |
| Fracture Toughness, KIC values | - |
| - Micro-indentation (MN m-1.5) | 3.3 |
| - Controlled Flow (MN m-1.5) | 2.7 |
| Elastic Modulus (GPa/106 psi) | - |
| - Sonic | 466 / 68 |
| - 4 point Flexure | 461 / 67 |
| Coefficient of Thermal Expansion (1/K) | - |
| - At Room Temperature | 2.2 x 10-6 |
| - Room Temperaure to 1000 oC | 4.0 x 10-6 |
| Heat Capacity (J/Kg-K) | 640 |
| Thermal Conducitivy (W/m-K) | 300 |
| Poisson's Ratio | 0.21 |
| Polishability (Optical profilometer) | <3 Angstroms RMS |
| Electrical Resistivity | Standard 20 - 5,000 Ohm-cm Low 1 - 10 Ohm-cm |
| CVD SILICON CARBIDE - Typical Trace Element Impurities in Parts per Billion by Weight using Gas
Discharge Mass Spectrometry (GDMS) and Neutron Activation Analysis (NAA). |
| Element | GDMS | NAA | Element | GDMS | NAA |
| Li | <3.2 | - | Rh | <3.6 | - |
| Be | <5.9 | - | Pd | <25 | - |
| B | 290 | - | Ag | <20 | <0.047 |
| Na | 30 | 0.63 | Cd | <150 | <0.57 |
| Mg | <34 | - | In | <22 | <0.097 |
| Al | 9.1 | - | Sn | <29 | <4.1 |
| P | 28 | - | Sb | <27 | 0.072 |
| S | 88 | - | I | <63 | - |
| K | <9.4 | <21 | Te | <26 | - |
| Ca | <5.8 | <840 | Cs | <13 | <0.0083 |
| Sc | <0.64 | <0.0006 | Ba | <5.7 | <2.2 |
| Ti | <4.2 | <1400 | La | <1.2 | <0.0062 |
| Cr | - | 0.16 | Ce | <9.8 | <0.038 |
| V | <1.4 | - | Eu | - | 0.021 |
| Mn | <3.9 | - | Tb | - | <0.0004 |
| Fe | <40 | <5 | Yb | - | <0.021 |
| Co | <4.0 | <0.67 | Nd | <7.3 | - |
| Ni | <13 | 205 | Hf | <6.1 | <0.0058 |
| Cu | <16 | 1.55 | Ta | - | <0.0057 |
| Zn | <36 | 1.28 | W | <12 | 0.688 |
| Ga | <29 | <0.16 | Re | <5.3 | - |
| Ge | <28 | - | Os | <6.3 | - |
| As | <9.4 | 5.70 | Ir | <8.5 | <0.0001 |
| Se | <100 | 0.11 | Pt | <9.6 | <19 |
| Br | - | <0.02 | Au | - | 0.028 |
| Rb | <11 | <0.36 | Hg | <43 | <0.02 |
| Sr | <1.1 | <3.9 | Tl | <21 | - |
| Y | <0.87 | - | Pb | <7.1 | - |
| Zr | <3.2 | <4.5 | Bi | <6.1 | - |
| Nb | <3.5 | - | Th | <0.61 | <0.007 |
| Mo | <17 | 0.28 | U | <0.42 | <0.039 |
| Ru | <7.5 | - | - | - | - |
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