Cryo

The EBARA ICP series of Cryopumps are designed to meet the needs of today's high technology manufacturing environment. They feature the largest process gas capacities available with a unique variable speed, three phase motor control to enhance the performance during standard operation and Full and Partial regeneration's.

The ICP series of pumps are available in a variety of sizes ranging from four inch through sixteen inch diameter with most sizes available in a "upright" or "low profile" package. Each size and model of pump can be configured for UHV, Sputtering or High Vacuum applications. They are available as basic pumps or in a fully automated Quick Regeneration pump package.

Pumps configured for sputtering applications offer the largest capacity available for typical process gasses. This can significantly increase time between regenerations. They also feature a unique inlet array design, which allows operation at higher process pressures before the throughput limit of the pump is reached.

EBARA Technologies, Incorporated (ETI), 51 Main Avenue, Sacramento, CA 95838. Tel: 916-920-5451; Fax: 916-925-6654.