Copper Damascene Plating Tool
Source: Technic Inc., SemiConductor Division
The Copperhead 2900 is a full featured, fully automatic single process module with manual or automatic loading configured for use in a laboratory or cleanroom environment
Technic Inc., SemiConductor Divisionead 2900 is a full featured, fully automatic single process module with manual or automatic loading configured for use in a laboratory or cleanroom environment. This process module cleans, copper plates and rinses, in a face up orientation within a single automated, self-contained assembly. The system is fully "dry-in" and "dry-out" processing. Originally configured for 200mm R&D applications, the addition of an automated robotic cassette load and unload module allows pilot production capability. It is constructed of electropolished stainless steel and designed to meet the specifications of SEMI S2-93 and Factory Mutual fire standards ensures safety and reliability.
<%=company%>,1170 Hawk Circle, Anaheim, CA 92807. Tel: 714-632-0200. Fax: 714-632-1056.