Datasheet | October 8, 2013

Compact Supercritical Dryer: PCO-4SC Datasheet

NTT-AT’s PCO-4SC Supercritical Dryer has been designed to prevent pattern collapse in semiconductors in the manufacturing process. This phenomenon occurs when the liquid solution that was used to rinse the pattern dries up. To find out how to prevent pattern collapse in fine structures, download the datasheet.

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