Combination Reticle Stocker

PRI Automation Inc.tion Reticle Stocker combines high-density, bare reticle storage with quick access, reticle box and pod storage to improve stepper utilization and more effectively manage reticle inventory. PRI Automation Inc.tion Reticle Stocker can be configured to store up to 5,000 bare reticles and up to 400 reticles stored in industry standard pods or boxes. Less frequently used reticles are archived in the bare reticle side of PRI Automation Inc.tion Reticle Stocker until they are needed for production. A reticle-handling robot on the bare reticle side gently places a reticle into a carrier and closes the carrier. Another robot on the pod or box side takes the carrier and moves it to a storage shelf or delivers it to the operator I/O. The pod or box side permits pre-kitting, ensuring that reticles are available to the operator when required.
PRI Automation Inc.tion Reticle Stocker can be integrated with PRI
PRI Automation Inc.tion Reticle Stocker can be integrated with PRI's TransNet Reticle Management System (TRMS) for complete reticle lifecycle management.

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