CO Filter/Purifier

Millipore Corporationre Carbon Monoxide (CO) Micro and Mini XL Filter/Purifiers integrate filtration and purification technology. These filter/purifiers are designed to protect wafers and process equipment from particulate and molecular contamination including metallic contamination from toxic metal carbonyls carbon monoxide applications.

These products are suitable for semiconductor processes and other gas applications that use difficult to handle carbon monoxide. These filter/purifiers also feature a patented sintered, stainless steel membrane that removes particles from 0.003 mm diameter and larger.

These products makes CO easier to handle and safer to use. Compact in size the electropolished, fusion welded, 316 stainless steel housing assemble resists corrosive conditions and installs easily into a gas system.

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