CMP Reference Guide
A reference guide is available that focuses on CMP processes and consumables
N/A guide is available that focuses on CMP processes and consumables. It is designed for use by engineers and non-engineers, providing detailed application information as well as simpler explanations and overviews. The publication also describes market trends and future expectations for process advancement. Topics covered include copper CMP, low-k materials/CMP, copper deposition, polysilicon CMP and CMP equipment. Numerous photographs and graphics are also included. The guide is available in hard copy and CD-ROM.
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