Product/Service

Cleaning Processor/Photomask Cleaner

Source: Solid State Equipment Corporation
As improved cleaning becomes ever more critical for highest integrated circuit manufacturing yield, the requirements for reduced defect densities at smaller sizes increase exponentially.
Solid State Equipment Corporation cleaning becomes ever more critical for highest integrated circuit manufacturing yield, the requirements for reduced defect densities at smaller sizes increase exponentially. The Evergreen Model 300 ML cleaning processor brings the power of the company's advanced single wafer cleaning technology to you in a low cost m, manual load, fully automatic system. It is a PC-based system in a compact, fully enclosed package that is SEMI S2-93 compliant for safety and ergonomics. The unit is based on the company's advanced scrubbing technology that has proven cleaning performance throughout the integrated circuit industry. A full suite of tools, including Megasonic and high pressure scrub, a new, robust scrub brush, and versatile mixing dispensers, allows users to configure the system around specific cleaning processes. All process parameters are under full PC program control, including brush and nozzle motion profiles, brush rotation, and brush pressure. A convenient Windows user interface makes operation and setup easy.

<%=company%>, 185 Gibraltar Rd., Horsham, PA 19044. Tel: 215-328-0700 Ext. 737. Fax: 215-328-9410.