ChemQual Sampler

Pacific Scientific Instruments is proud to introduce the ChemQual Online Sampler for pre-hook up qualification of Chemical Distribution Systems. ChemQual enables faster start up of chemical distribution modules and delivery systems in the Semiconductor and Flat Panel Display Industries.

Utilizing CountSpec software, ChemQual collects particle data by means of a set of user defined "procedures" that fulfill custom SOP requirements. This flexible software coupled with the industry-standard MicroCount liquid particle counter, provides sensitivity options between 0.1-5 micron.

Although ChemQual was designed for use with CountSpec Software, users may upgrade to Particle Vision Online Software for continuous event monitoring or extended process optimization studies. A proprietary flow controller regulates low and high viscosity chemicals. Also, an air pump is included, allowing ChemQual to be purged between tests. These features make ChemQual ideally suited for point of use qualification tests.

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