Chemical Dispense Systems

The Trackmate family of products includes a variety of liquid chemical dispense systems, which meet individual chemical management needs. The primary function of each dispense system is to store, monitor, and distribute a continuous supply of chemicals, resulting in maximum chemical usage, while maintaining chemical purity throughout the transport and dispense processes. The electronic control system interfaces with any track equipment to provide real time information for the management and status of each chemical.

These products will interface with track systems and dispense photoresist and other photolithography chemicals on demand. The photoresist delivery system, which is standard in these products, dispenses photoresist at a high purity through airtight fluid paths and 0.1 micron filtration which results in fewer defects and higher yields. Other features include the technique which prevents the drying out of fluid lines, while ensuring more than 99% usage of expensive photoresist.

Microbar Inc., 1252 Orleans Drive, Sunnyvale, CA 94089. Tel: 408-541-1040. Fax: 408-541-1441.