CFM Wafer Transfer Systems

Reliable, high-throughput wafer handling. The Wafer Transfer System (WTS) provides the means to load and unload wafers to and from the processing chamber of the OMNI™ Vessel Module. Three common models of WTSs are 6-inch, 100-wafer capacity; 8-inch, 50-wafer capacity; and the 8-inch, 100-wafer capacity. These fully automated devices allow for user-selectable discrete batch sizes ranging from 25 to 100 wafers, depending on the specific model. Refer to the table in Figure 1 for the capability of each model. Most WTSs have the capacity to accept a second batch of wafers (up to 100) which they will hold in queue while processing the first batch of wafers. Batch sizes may be intermixed if desired. The operator simply places an appropriate number of standard wafer-transfer cassettes on the WTS loading stations, and begins the process via the touch-screen operator interface of the OMNI™ tool.

The optional queuing capability provided with the high-throughput, 8-inch, 100 WTS enhances the wafer processing performance of the OMNI™ tool by sharply reducing overall wafer handling time, thereby increasing wafer throughput. A particle-free wafer handling zone is ensured by integrating the WTS with an enclosed mini-environment. Particles are managed by optimized airflow patterns through the mini-environment, and HEPA filtering. For an even greater degree of wafer cleanliness, the 8-inch, 100 WTS is fully compatible with SMIF-based wafer handling systems.

CFM Technologies, Inc., 150 Oaklands Blvd., Exton, PA 19341. Tel: 610-280-8300; Fax: 610-280-8309.