Cartridge Filters

QuickChange AT and ATX cartridge filters are water-wet and ready to use in aqueous-based chemicals. The lack of IPA prewetting prevents any alcohol/chemical interaction and eliminates a potential source of contamination. The filters also reduce filter change-out time, minimize system downtime, and lower cost of ownership.

The filters use the entire filtration area. Even during chemical dumps, which drain the filter housing and expose the filter to air, the filters do not dry out. They also ensure consistent flow rates, which stabilize parameters and decrease system downtime.

The filters are packaged in ultrapure DI water. In addition to the standard double bag, which prevents particle contamination, an autoclave step is added to prevent microbiological contamination.

Advantages include ready-for-use with aqueous-based chemicals, not dewetting in air during installation or during chemical dumps and drains, not dewetting in outgassing chemicals, and good particle removal.

• Cleanliness: Two particles/ml > 0.2µ after 10-min water flush at 1 gpm
• TOC Recovery: Within 5 ppb of feed after 30-gal water flush at 1 gpm
• Resistivity Recovery: Within 0.2 megohm of feed after a 30-gal water flush at 1 gpm
• Compatibility: Aqueous-based chemicals at ambient temperatures, including H₂SO₄, H₃PO₄, HNO₃, HF, HCI, BOE, NH₄F, H₂O₂, NH₄OH, TMAH, and ozonated water as well as elevated temperature applications including SC1, SC2, piranha etch, and metal etch

Millipore Corp., Tel: 800-MILLIPORE; Fax: 800-MILLIFX.