Capacitance Manometer Upgrade Program

MKS Instruments, Inc. announces an upgrade program for end-users of both MKS Baratron Capacitance Manometers and competitors' capacitance manometers. The program provides a trade-in value for their current instrument with the purchase of a newer version of a Baratron Capacitance Manometer. By taking advantage of the MKS Baratron Capacitance Manometer Upgrade Program, end-user customers can save money and benefit from the latest MKS technology. MKS applications engineering process experts are available to help users determine the best upgrade for their application.

Users of the upgrade program benefit from improved features, such as those in the latest MKS 600B Series Baratron Capacitance Manometers. These new instruments can improve up time, process throughput, and product yield by reducing warm-up time, reducing the time spent for zero-checking, increasing gauge reliability and stability, and reducing particulate generation. Warm-up times for the new 600B Series Baratron Capacitance Manometers have been cut in half relative to the older models, which means that processes can start earlier following each maintenance cycle.

Newer Baratron Capacitance Manometers can operate with the sensor temperature controlled up to 200°C. Higher temperature operation of the manometer can prevent contamination during chemical vapor deposition and plasma etching processes. This improves both reliability and up time. Temperature-controlled manometers have an optional Up-to-Temperature Status Indicator that provides visual and electrical information that the sensor is at the regulated temperature—adding confidence and diagnostic capability. Measurements are accurate and repeatable, resulting in increased throughput. Correct temperature control eliminates deposition and contamination, resulting in more accurate pressure control and higher yield.

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