Capacitance Manometer

MKS Instruments, Inc. offers the Type 629B Baratron temperature-controlled capacitance manometer for improved etch and CVD tool performance. The 629B can be temperature-regulated at either 45° C or 100° C. Improved on-board temperature control electronics and thermal design ensure superior long-term stability and repeatability. An "At Temperature" LED/switch indicates when the integrated heater is in control. In addition, a patented integrated sump has been added to provide particle protection when used in applications such as plasma etching and chemical vapor deposition. The all-welded sensor is constructed of Inconel, and the new stainless shell enhances cleanroom compatibility.

The 629B is accurate to within 0.12% of reading. This accuracy specification is superior to the usual specification that is given in terms of percent of full scale because it yields a more precise output signal in lower pressure ranges. At the heart of the 629B is the capacitance-based, extremely accurate and repeatable Baratron pressure sensor. As with all MKS Baratron capacitance manometers, the pressure reading is independent of gas composition.

It is available in full-scale pressure ranges from 20 mTorr to 1000 mTorr. It is fully interchangeable with MKS 629A transducers and can be used with a variety of MKS Baratron power supplies, display units, and pressure controllers. The 629B meets CE requirements for the European Union.

MKS Instruments, Six Shattuck Rd., Andover, MA 01810. Tel: 800-227-8766 or 978-975-2350. Fax: 978-975-0093.