Capacitance Diaphragm Gauge (CDG)
Featured at Semicon Europa
The Sky capacitance diaphragm gauge (CDG) uses an ultrapure aluminum oxide ceramic diaphragm for vacuum measurements of superior accuracy and repeatability. Its revolutionary design eliminates the weaknesses of conventional metal diaphragms, dramatically improving consistency, corrosion resistance, sensor life, and temperature stability. Since the Sky alumina ceramic diaphragm is more rigid then metal, it does away with the problems of stretching, temperature change, material imperfections, and corrosion. Also, it is not deformed by repeated pressure cycling or overpressure, decreasing zero drift and shortening the time needed for readings to stabilize during each process cycle, as well as eliminating the need for isolation valves.
Leybold Inficon, Inc. 2 Technology Place, E. Syracuse, NY 13057. Tel: 315-434-1100.