Product/Service

Canon FPA-1550 MII Wafer Stepper

Source: Service Consortium Inc.
Reticle - 126.6mm x 2.3mm
Reticle
    126.6mm x 2.3mm

Wafer Size
    6 inch

Optical Specifications
    5X Magnification
    15mm Image Field
    0.8 micron Resolution
    g-line Printing Wavelength

Service Consortium Inc., 1613 South Main St., Milpitas, CA 95035-6261. Tel: 408-935-9700; Fax: 408-719-9700.