Bulk Delivery System
Source: Air Products and Chemicals, Inc.
ChemGuard Bulk Chemical Delivery (BCD) System is stainless steel and compatible with electronic chemicals used in chemical vapor deposition processes (CVD)
Air Products and Chemicals, Inc.ulk Chemical Delivery (BCD) System is stainless steel and compatible with electronic chemicals used in chemical vapor deposition processes (CVD).
Using a direct digital control interface to communicate with a wide variety of process tools, the system features stainless steel piping and large flow capacity suitable for the requirements of high-purity, high-volume fab-wide chemical supply. An ultrasonic empty sensor allows 99.99% of the bulk chemical to be used, while a microprocessor-based controller monitors the removal of all chemical from the container connections.
The system's cabinet design reduced exhaust requirements by 75% and maximizes the use of floorspace in the fab by incorporating a small footprint and minimal clearance requirements.
<%=company%>, 7201 Hamilton Boulevard, Allentown, PA 18195-1501, Tel: 760-603-2225
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