Batch Processing Tool

Semitool, Inc.cepter Solvent is a 50-wafer, single- chamber, semi-automated batch processing tool. This spray solvent tool doubles the productivity of earlier models, offering a 50-wafer single chamber capacity.

The tool comes with standard fusion-bonded chemical lines. Metallic ion contamination is reduced via the company's patented SEP21 electropolished stainless steel components. The features of the 50-wafer tool were designed to achieve the highest possible process performance and productivity.

<%=company%>, 655 West Reserve Drive, Kalispell, MT 59901. Tel: 406-752-2107; Fax: 406-752-5522