B-PACK
B-PACK will be available for a standalone Windows NT (4.0) workstation that will run the Local DREAM Server and VRE application. This package will allow them to test and evaluate the off-line recipe editing functionality for one process tool type.
The VRE and DREAM Server product combination helps fabs in certain areas like Ion Implant and Etch to help reduce scrap due to mistakes in changing the recipes at the tools. These tools provide significantly more protection and audit trails over what exists at the tool.
B-PACK will enable the Fab management to really test the concept of Off-line Recipe Editing at a minimal cost, before significant investment is done in this kind of automation project.
Sapphire Software, Inc., 200 Brown Rd., Suite 200, Fremont CA 94539. Tel: 510-413-4970. Fax: 510-413-4973.