Axys Wafer Transfer Robots

Axys 407 is the latest addition to its family of Axys wafer transfer robots, utilizing direct drive technology and achieving the versatility, repeatability and reliability needed to withstand the rigorous manufacturing demands of advanced semiconductor process tools.

Asyst's Axys 407 robot is directly driven by a sealed-for-life gear system, which eliminates maintenance downtime. In addition, the Axys 407 incorporates four major field-replacable sub-assemblies that reduce the total parts count by up to a factor of five over older robot designs, enabling the Axys 407 to achieve a reliability of greater than 10 million mean cycles before failure (MCBF), thus delivering the reliability and precision needed to improve the performance of OEM tools both for existing and new applications.

The Axys 407 robot is sub-class 1 cleanroom compatible and is capable of moving either 200 mm or 300 mm wafers from any position in a wafer cassette or carrier into a process station or loadlock of any process tool. Its proprietary SmartCourse software allows the operator to specify complex robotic motions and enables it to move wafers from two 300 mm front opening unified pods (FOUPs) without the use of an expensive horizontal linear track. The Axys 407 also serves as a critical component of Asyst's PLUS Portal, the industry's first turnkey, tool-automation solution that enables seamless integration between OEM production tools and advanced fab automation systems.

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