Axcelis Secures Order From Asian Memory Manufacturer For Optima HD Imax

Beverly, MA - Axcelis Technologies, Inc. recently announced that it received an order in December 2006 from one of the world's top memory manufacturers for its Optima HD Imax molecular implanter. Following on the customer's previous order last year for Axcelis' standard Optima HD high dose implanter, the new Optima HD Imax will enable them to dramatically increase productivity by implanting clusters of boron rather than individual atoms. The company claims that the tool was selected specifically for its ability to perform high dose, dual poly gate implants and other advanced applications on leading edge DRAM devices. The system is expected to ship this month.

"This order is very significant, serving as powerful validation for our Optima HD platform while demonstrating customer confidence in this groundbreaking molecular implanter," said Mary Puma, chairman and CEO of Axcelis. "The Optima HD Imax provides the most effective throughput because it delivers the highest beam current performance at the lowest energy with zero contamination. This convincing productivity advantage, built on standard implant technology, sets the Optima HD Imax apart from competing technologies."

According to the company the Optima HD Imax implants molecules of B₁₈H₂₂, which includes 18 boron atoms, resulting in higher productivity than users can achieve with traditional approaches that implant one atom at a time. It delivers precise implants using Axcelis' advanced spot beam technology, resulting in exceptional implant uniformity and repeatability, while avoiding the risk of energy contamination associated with beam deceleration. The resulting boost in productivity enables chipmakers to adopt a number of emerging trends, including dual poly gate applications for advanced memory devices and shallower junctions in logic chips.

For further information you can visit www.axcelis.com

SOURCE: Axcelis Technologies, Inc.