AX7620 Chemical Downstream Plasma System

The AX7620 is the first fully-integrated downstream microwave plasma source for resist strip and isotropic etch. Using field-proven hardware packaged into a single unit, ASTeX makes it easy to integrate the AX7620 into any processing system. The AX7620 mounts easily to the chamber lid or loadlock.

The AX7620 contains all the requisite components for processing: microwave power generator, matching unit, plasma applicator, control electronics and diagnostics. The user only provides power, cooling water and process gases. No external rack space is needed.

The ASTeX plasma applicator, combined with the SmartMatch intelligent matching unit, allows processing in almost any gas mixture used for etch and strip. The fast matching capability of the SmartMatch makes complex, multi-step processing easy. The AX7620's high radical flux and minimum ion/electron/UV flux yield high rates at moderate temperatures with ultra-low wafer damage.

ASTeX's field-proven hardware and modular construction mean high reliability and uptime. Built-in diagnostics make maintenance simple.

Advantages

• Turnkey solution, easy integration
• Wide process window with multistep process capability
• High wafer throughput with low device damage
• High reliability and uptime
• Isotropic etch or strip with one hardware set

N/A, 90 Industrial Way, Wilmington, MA 01887. Tel: 978-284-4000; Fax: 978-284-4999.