Automatic Pressure Controller PC-71/72 and PV-100 series
Source: Aera Corporation
When combined with a general-purpose pressure sensor, the PC-71/72 and PV-100 series function as a precision automatic pressure controller for a wide variety of semiconductor applications
When combined with a general-purpose pressure sensor, the PC-71/72 and PV-100 series function as a precision automatic pressure controller for a wide variety of semiconductor applications. The valve (PV-100 series) can be installed on the pouring side or to the exhaust side of the chamber, and is automatically controlled by a pressure signal. The valve can also respond to a wide variety of inputs and gain settings, and can arbitrarily set a time constant to determine optimal control.
Design Features
- Lightweight design
- Excellent operability despite multi-functionality
- Alarm output for abnormal timing
- PV-100 valve available in both normally open and normally closed as well as with metal seals
Aera Corporation, 8601 Cross Park Drive, Suite 110, Austin, TX 78754. Tel: 512-339-7100; Fax: 512-339-8889.