Automatic Defect Classification (ADC) Software Solutions
Source: KLA-Tencor
The IMPACT SEM XP is the latest addition to the IMPACT XP suite of automatic defect classification (ADC) software solutions
KLA-TencorSEM XP is the latest addition to KLA-TencorXP suite of automatic defect classification (ADC) software solutions. With IMPACT SEM XP, KLA-Tencor brings to its eV300 SEM review tool the same ADC capabilities already implemented on its high-resolution optical wafer inspection platforms—enabling intelligent defect sampling and classification, as well as more accurate sourcing of yield-limiting defects that affect device performance and reliability.
Two key elements of this suite are RTC for real-time classification of defects as the wafer is being inspected, and HRDC for high-resolution defect classification while the wafer resides on the inspector.
IMPACT SEM XP features SmartGallery, an interface common to both optical and e-beam platforms. With SmartGallery, fab engineers can leverage training and experience obtained from an optical ADC inspection tool to the SEM ADC tool--minimizing the time and expertise required to set up a SEM ADC system.
<%=company%>, 160 Rio Robles, San Jose, CA 95134. Tel: 408-875-4200.
Two key elements of this suite are RTC for real-time classification of defects as the wafer is being inspected, and HRDC for high-resolution defect classification while the wafer resides on the inspector.
IMPACT SEM XP features SmartGallery, an interface common to both optical and e-beam platforms. With SmartGallery, fab engineers can leverage training and experience obtained from an optical ADC inspection tool to the SEM ADC tool--minimizing the time and expertise required to set up a SEM ADC system.
<%=company%>, 160 Rio Robles, San Jose, CA 95134. Tel: 408-875-4200.
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