Automated Material Handling System

PRI Automation Inc.Fab is the first unified material handling system (UMHS) capable of providing fab-wide tool-to-tool wafer delivery in 300mm fabs. The system makes direct tool-to-tool wafer transport faster and more efficient by combining interbay and intrabay transport into one seamless solution. The system offers flexible configurations allowing semiconductor manufacturers the opportunity to configure a TransFab solution that meets their requirements.

With its AeroLoader transport system and robust TransNet software suite, the system responds instantly to fab priorities for fast hot lot delivery, accommodates 300mm fab flexibility demands and implementation preferences, and ensures dependable performance for fully automated environments.

Three TransFab implementation options are available to accommodate each customer's preferences:

Fully Unified - Interbay and intrabay transport systems are combined into one unified fab-wide system. The interbay system can be implemented first, with phased implementation of intrabay loops. Fully unified implementations optimize resource sharing, system flexibility, and hot lot delivery.

Partially Unified - A partial unified configuration assigns AeroTrak for fab-wide interbay transport and the AeroLoader intrabay transport with selected adjacent bays linked. It enables an incremental approach to unified AMHS with some direct tool-tool delivery and resource sharing.

Combination Unified - This configuration combines an AeroTrak system for interbay transport plus a complete unified wafer transport system using the AeroLoader III for tool-to-tool delivery. Offers all the benefits of TransFab plus additional system bandwidth from the parallel AeroTrak system.

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