Automated Inspection System

The AIT is an automated inspection system for thin film head (TFH) applications in the data storage industry. Designed to help TFH manufacturers increase yields and potentially save in lost revenue, it enables the immediate detection of process tool excursions, minimizing the number of TFH wafers exposed to out-of-control process conditions.

The need for TFH inspection is driven by unceasing demand by PC users for increased data storage capacity. This dramatic increase in storage density is driving TFH manufacturers to transition rapidly to giant magneto resistive (GMR) technology to produce the smaller thin film heads needed to read and write on these extremely dense disk drives. This is driving TFH critical dimension shrinks at an accelerating rate.

Industry figures indicate that typical yield rates in TFH manufacturing currently run between 35 and 80 percent post-rework, as opposed to the 90 percent or greater pre-work yields normally seen in the semiconductor industry. Automated inspection plays a critical role in helping the IC industry achieve these high yields . Such automation can provide TFH manufacturers with similar inspection capabilities for their yield improvement strategies.

KLA-Tencor Corporation, 160 Rio Robles, San Jose, CA 95134. Tel: 408-875-4200.