Automated Film Metrology System
Source: Nanometrics Inc
The NanoSpec 9100 is an automated, non-contact film metrology system designed to measure films on substrates used in wireless, optical telecommunication integrated circuit manufacturing and other semiconductor devices
Nanometrics Incc 9100 is an automated, non-contact film metrology system designed to measure films on substrates used in wireless, optical telecommunication integrated circuit manufacturing and other semiconductor devices. The system is equipped with deep-ultraviolet (DUV) to near-infrared spectroscopic ellipsometry, DUV to visible reflectometry and Fourier transform infrared (FTIR) technology.
Robotic automation allows for delicate wafer handling while offering high throughput. The layout of the system's software meets SEMI standard E95-0200, Specification for Human Interface for Semiconductor Manufacturing Equipment. Based on Windows NT, the software allows for seamless recipe transfer from the standalone system to Nanometrics' Integrated Metrology platforms. In addition, the system offers a new reflectometer with a wavelength range of 190-780 nm incorporating a cooled CCD array detector that provides excellent signal-to-noise ratio for improved measurement performance.
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