Automated Defect Analysis Decision-Making

Klarity 1.0 (KLA-Tencor, San Jose, CA), a new automated analysis module, embeds expert decision-making processes in defect analysis software. The module is an enhancement to KLA-Tencor's Quest Defect Data Management System, which automatically collects defect data from multiple sources throughout the fab.

The data is then integrated for advanced excursion monitoring, yield correlation and reporting, resulting in increased efficiency in analyzing defect trends and defect sources. Quest is an integral part of KLA- Tencor's Intelligent Line Monitoring solution, which provides seamless defect detection, classification and analysis.

Klarity 1.0 allows tool users to take integrated information and automate the complex engineering analysis methodologies used to resolve yield issues, via simple flow charts. The module's automated decision flow analysis (DFA) recipes automatically identify yield-limiting defects and flag out-of-control conditions, enabling rapid resolution of yield problems that previously would have required manual analysis.

A DFA recipe encapsulates the analysis steps an engineer would follow to make decisions on how to respond to specific defect data. Klarity's DFA recipes are generated using a graphically intuitive interface and appear as branches of decision tree flow charts as they are created. Stored recipes are triggered either by events or scheduled by times and dates.

KLA-Tencor Corporation, 160 Rio Robles, San Jose, CA 95134. Tel: 408-875-4200; Fax: 408-571-3030.