Auriga
Source: SpeedFam-IPEC Corp.
The Auriga Planarization System delivers state-of-the-art process results with exceptional throughput and a
The Auriga Planarization System delivers state-of-the-art process results with exceptional throughput and a low cost of ownership.
- Throughput of up to 100 wafers per hour in actual production
- System layout maximizes throughput for two table process
- Distributed process control design maximizes reliability and tool serviceability
- Optional in-line thin film measurement and end-point systems
- Retrofitable with Auriga C/EC front end integrated cleaner
- S2-93 Safety Certified, CE Marked, SECS-II & GEM Compliant
SpeedFam-IPEC Corp., 405 North 54th St., Chandler, AZ 85226. Tel: 480-961-1600; Fax: 480-705-2733.