ATOMICAS Deposition Controller
Source: Luxtron Corporation
The ATOMICAS™ Deposition Controller utilizes atomic absorption spectroscopy to measure the number density of atoms in vapor phase.
The ATOMICAS™ Deposition Controller utilizes atomic absorption spectroscopy to measure the number density of atoms in vapor phase. The installation of ATOMICAS requires a pair of optical windows on the deposition chamber to allow the passage of probing light beams. For existing deposition systems without suitably located optical windows, optional vacuum probes can be installed inside the deposition chamber.
Luxtron Corporation, 2775 Northwestern Parkway, Santa Clara, CA 95051. Tel: 408-727-1600; Fax: 408-727-1677.